NSF 2000 WORKSHOP ON
MANUFACTURING OF MICRO-ELECTRO-MECHANICAL SYSTEMS

DoubleTree Club Hotel, Lake Buena Vista, Orlando, Florida, November 7, 2000

Table of Contents

 

Page

Preface

iii

INTRODUCTION

1

FOCUS AREAS

3

     Fabrication

 

     Applications

 

     Packaging and Reliability

 

FABRICATION GROUP RECOMMENDATIONS

7

APPLICATIONS GROUP RECOMMENDATIONS

12

PACKAGING AND RELIABILITY GROUP RECOMMENDATIONS

16

SUMMARY

23

APPENDIX

 

     A. Workshop agenda

25

     B. Attendees List

26

     C. Position Papers in Fabrication Area

 

          William C. Tang: Fundamental of MEMS Fabrication

30

          Minking K. Chyu: Developments of Ultra-Deep LIGA Processes

33

          Stephane Evoy: Nanotechnology in Microsystems: Prospects and Challenges of 
                                   Nanomechanical Devices

35

          Gary Fedder: MEMS Fabrication

38

          Robert Horning: Issues in MEMS Fabrication

41

          Michael A. Huff: MEMS Manufacturing

44

          Kevin Kelly: Manufacturing MEMS

47

          Nader Najafi: MEMS Manufacturing Fabrication: Going Back to Basics

50

          Taher A. Saif: MEMS Fabrication

54

          Robert Sulouff: Opportunities for Research Collaboration in the Manufacturing
                                 
MEMS

56

          Ampere A. Tseng: Maskless Submicron Fabrication Techniques: Any Future?

58

     D. Position Papers in Applications Area

 

          James J. Allen: MEMS Applications

61

          N. R. Aluru: CAD Enabled Innovation of MEMS Applications

63

          Suresh G. K. Ananthasuresh: Manufacturing Issues in Integrated Systems of
                                                       Small Size

65

          Kuan Chen: Planar Thermal Sensors and Actuators

68

          Fred K. Forster: Applications in Microfluidics

71

          Abraham P. Lee: BioMEMS At the Interface of In Vivo Intervention and In Vivo
                                     Diagnostics

73

          Subrata Mukherjee: MEMS Applications in Sensors and Actuators Optimal 
                                         Design of MEMS

76

          Chao-Hung Steve Tung: An Overview of MEMS Inertial Sensors

78

          George P. Vakanas: MEMS Manufacturing, Applications & Commercialization

80

          Frederic Zenhausern: Design, Materials and Measurement Issues for Biological 
                                              Microreactors (BioMEMS)

83

      E. Position Papers in Packaging and Reliability Area

 

          Yung-Cheng Lee: MEMS Packaging and Reliability

86

          Ken Gilleo: MEMS Packaging Issues

89

          Shiv Joshi: Manufacturing of MEMS

91

          Liwei Lin: MEMS Packaging at the Wafer Level

93

          Guo-Quan Lu: Critical Role of Materials Research for Packaging and Reliability of
                                
Micro-Electro-Mechanical Systems (MEMS)

96

          John Patrick O'Connor: NSF Workshop on Manufacturing of  Micro-Electro-
                                               Mechanical Systems

98

          Bahgat Sammakia: Some Aspects of Modeling Needs in Emerging New
                                      
Technologies: MEMS, Photonics and Biotechnology

100

          Peter Sandborn: MEMS Packaging and Reliability

103